KEYENCE - IM-7030TLV-MEA-KEY-2018-00001

Controller: IM-7000

Image pickup device: 1" 6.6 megapixel monochrome CMOS

Display: 10.4" LCD monitor (XGA 1024×768)

Light receiving lens: Double telecentric lens

Illumination system: Telecentric transmissive, top light, four-division multi-angle illumination (motorized), slit ring illumination (motorized)

Measurement modes: Wide-field, High-precision

Wide-field measurement area: 300 × 200 mm (quadangle R50)

High-precision measurement area: 225 × 125 mm

Minimum display unit: 0.1 µm

Measurement accuracy (wide-field, without stage move): ±1 µm

Measurement accuracy (high-precision, without stage move): ±0.5 µm

Measurement accuracy (wide-field, with stage move): ±2 µm

Measurement accuracy (high-precision, with stage move): ±1.5 µm

Linked measurement accuracy: ±(7 + 0.02L) µm (wide-field), ±(4 + 0.02L) µm (high-precision)

Measurable area (XY, stage): 90 × 90 mm

Maximum measurement depth: 30 mm

Light probe diameter: 3 mm

Measuring force: 0.015 N (light probe), 0.3 N (height measurement)

Repetition accuracy: ±2 µm

Measurement range (Z): 0–75 mm

Measuring position accuracy (XY): ±0.2 mm

Minimum display unit (height): 1 µm

Measurable area (XY) wide-field mode: 145 × 95 mm

Measurable area (XY) high-precision mode: 107.5 × 95 mm

XY stage: Motorized, movement range 200 × 100 mm, max load 5 kg

Z stage: Motorized, movement range 75 mm

External remote input: Non-voltage input (contact/solid-state)

External output: PhotoMOS, OK/NG/FAIL/MEAS, rated load 24 VDC, 0.5 A

Interface: LAN RJ-45 (10/100/1000BASE-T), USB 2.0 Series A (6 ports)

Record storage: HDD 500 GB

Ambient temperature: +10 to +35°C

Relative humidity: 20–80% RH (no condensation)

Pollution degree: 2

Over-voltage category: II

Power supply voltage: 100–240 V, 50/60 Hz

Weight head: 31 kg

Controller weight: ~8 kg